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MATHEMATICAL MODEL OF THERMAL REACTION PROCESS FOR EXTERNAL HEATING EQUIPMENT IN THE MANUFACTURE OF SEMICONDUCTORS (PART I)
https://nuis.repo.nii.ac.jp/records/60
https://nuis.repo.nii.ac.jp/records/603c1c5f5a-1efd-4d45-8de8-16f4e3585466
名前 / ファイル | ライセンス | アクション |
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g_zashir_1.48.pdf (453.6 kB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2013-05-16 | |||||
タイトル | ||||||
タイトル | MATHEMATICAL MODEL OF THERMAL REACTION PROCESS FOR EXTERNAL HEATING EQUIPMENT IN THE MANUFACTURE OF SEMICONDUCTORS (PART I) | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | MATHEMATICAL MODEL OF THERMAL REACTION PROCESS FOR EXTERNAL HEATING EQUIPMENT IN THE MANUFACTURE OF SEMICONDUCTORS (PART I) | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Semiconductor manufacturing equipment | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Thermal reaction process | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | External heating equipment | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Distributed parameter system | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | Semiconductor manufacturing equipment | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | Thermal reaction process | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | External heating equipment | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | Distributed parameter system | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
著者 |
Shirai, Kenji
× Shirai, Kenji× Amano, Yoshinori× Omatu, Shigeru× Shirai, Kenji× Amano, Yoshinori× Omatu, Shigeru |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | This paper presents a mathematical model for a thermal reaction process of external heating equipment. The new control system design for this process, which treats a heat source owing model for an externally attached device is proposed. The equation of a distributed parameter system as a coupled system with the heat reaction process is presented. This paper proposes a lumped heating system to replace the distributed heating function with a time delay as a whole element. The model that is equivalent to a system in order to make possible practical devices is considered. This paper discusses the confguration of the linear model using the exact linearization method for the coupled system with external heating equipment. | |||||
書誌情報 |
International Journal of Innovative Computing, Information & Control : IJICIC en : International Journal of Innovative Computing, Information & Control : IJICIC 巻 9, 号 4, p. 1557-1571, 発行日 2013-04 |
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出版者 | ||||||
出版者 | ICIC International | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 1349-4198 | |||||
NCID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA12218449 | |||||
関連サイト | ||||||
識別子タイプ | URI | |||||
関連識別子 | http://www.ijicic.org/ | |||||
関連名称 | IJICIC | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 |