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MATHEMATICAL MODEL OF THERMAL REACTION PROCESS FOR EXTERNAL HEATING EQUIPMENT IN THE MANUFACTURE OF SEMICONDUCTORS (PART II)
https://nuis.repo.nii.ac.jp/records/61
https://nuis.repo.nii.ac.jp/records/6194e30fcf-c46f-4e36-ba50-8745b9a1b217
名前 / ファイル | ライセンス | アクション |
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g_zashir_1.49.pdf (394.6 kB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2013-05-16 | |||||
タイトル | ||||||
タイトル | MATHEMATICAL MODEL OF THERMAL REACTION PROCESS FOR EXTERNAL HEATING EQUIPMENT IN THE MANUFACTURE OF SEMICONDUCTORS (PART II) | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | MATHEMATICAL MODEL OF THERMAL REACTION PROCESS FOR EXTERNAL HEATING EQUIPMENT IN THE MANUFACTURE OF SEMICONDUCTORS (PART II) | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Semiconductor manufacturing equipment | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Thermal reaction process | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Bilinear partial differential equation | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Distributed parameter system | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | Semiconductor manufacturing equipment | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | Thermal reaction process | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | Bilinear partial differential equation | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | Distributed parameter system | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
著者 |
Shirai, Kenji
× Shirai, Kenji× Amano, Yoshinori× Omatu, Shigeru× Shirai, Kenji× Amano, Yoshinori× Omatu, Shigeru |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | This paper proposes a mathematical model that is derived from bilinear partial differential equations (BPDs) in order to configure a control system including the external heat equipment (EHE) proposed in Part1. It is widely recognized that the mathematical model of the heat exchange unit has been reported. The target control system can be configured using the control parameter of the overall heat exchange coefficient (OHEC), which is given using a linear approximation from BPDs to an ordinary differential equation (ODE). The numerical simulation results are also represented for the optimal control system, and the gradient method is used in this simulation. Our findings show that this study is suitable for possible practical systems. | |||||
書誌情報 |
International Journal of Innovative Computing, Information & Control : IJICIC en : International Journal of Innovative Computing, Information & Control : IJICIC 巻 9, 号 5, p. 1889-1898, 発行日 2013-05 |
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出版者 | ||||||
出版者 | ICIC International | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 1349-4198 | |||||
NCID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA12218449 | |||||
関連サイト | ||||||
識別子タイプ | URI | |||||
関連識別子 | http://www.ijicic.org/ | |||||
関連名称 | IJICIC | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 |